About: http://webisa.webdatacommons.org/13759438

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present disclosure describes several methods and apparatuses for removing materials from microelectronic workpieces used in the fabrication of semiconductor devices, micro-mechanical devices, and other types of devices.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com