About: http://webisa.webdatacommons.org/137631252

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	depositing a first liner silicon nitride film over the entire surface of the semiconductor substrate including the trenches;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au