| http://www.w3.org/ns/prov#value | - The tungsten hexafluoride is provided to an appropriate flow control valve at a flow rate of between about 10 sccm and about 400 sccm, such as between about 20 sccm and about 100 sccm, and thereafter pulsed for about 1 second or less, such as about 0.2 seconds or less.
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