About: http://webisa.webdatacommons.org/137868868

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The term ???workpiece??? as used herein includes semiconductor substrate, printed circuits, and other structures that may be chemically treated by the method and system of the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com