About: http://webisa.webdatacommons.org/137918004

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 2 wherein the material is a metal deposited in a chemical vapor deposition process.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com