About: http://webisa.webdatacommons.org/137930585

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The microcantilever 102 and the substrate 104 can be fabricated from materials such as silicon, silicon nitride, other semiconductors, or other similar materials or combinations thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com