| http://www.w3.org/ns/prov#value | - The argon gas flows between about 100 sccm and about 1,000 sccm, such as between about 100 sccm and about 400 sccm, through each valve 140A, 140B. In one aspect, at least a portion of a pulse of PDMAT may still be in the reaction zone when at a least a portion of a pulse of ammonia enters so that some co-reaction or gas phase co-reaction takes place.
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