About: http://webisa.webdatacommons.org/137983187

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The structure or layers formed could be, for example, various types of interconnection lines, contact or via fills, gates, word or bit lines, spacers, or insulative layers, among others.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au