About: http://webisa.webdatacommons.org/138020519

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The removal of selected portions of pattern films, as a form of semiconductor processing in forming high-resolution images, is a particularly useful application of a supercritical fluid.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com