About: http://webisa.webdatacommons.org/13819465

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, the shield material is etched so as to be left on regions, including a region above the through hole 109 of the metal conductive film 120a and a region above the channel portion 105, thereby forming a shield film 121.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr