About: http://webisa.webdatacommons.org/138294385

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, an insulating material such as silicon dioxide is deposited on the entire surface of the substrate 1 using the CVD method, thus forming the protective film 12, as shown in FIG. 5H.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr