About: http://webisa.webdatacommons.org/138311709

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These observations indicate that a combination of either a hot water or IPA treatment and storage in an inert ambient such as nitrogen enhances the shelf life of polished silicon wafers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com