| http://www.w3.org/ns/prov#value | - The force amplification achieved with devices of these embodiments increases the capacity for sensitivity of micromachined pressure sensors by about 1???1,000 times, such as about 50???500 times, and including about 150???250 times (see FIG. 25), as compared to sensitivities achieved with analogous devices in which the beam element(s) is not present.
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