About: http://webisa.webdatacommons.org/138363233

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The sidewall spacers 26 may be made of a conductive material, such as polycrystalline silicon or metal.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com