About: http://webisa.webdatacommons.org/138472674

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	TECHNICAL FIELD [0003] The present invention relates generally to micro-mechanical devices, and more particularly to a device and method for damping the movable elements of such devices.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com