About: http://webisa.webdatacommons.org/138553588

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The sensor is an acceleration sensor having a movable mass element M which is suspended from the silicon layer 3 via spring elements F1, F2 and further spring elements (not illustrated).
http://www.w3.org/ns/prov#wasQuotedFrom	google.es