About: http://webisa.webdatacommons.org/138554298

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The dose of ions 24 must be high enough relative to the dose of ions 23 so that the doping type of ions 24 predominates in region 13h and other regions which have received both implants.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com