About: http://webisa.webdatacommons.org/138554574

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The semiconductor substrate 10, which may contain semiconductor device structures such as gate electrodes and source and drain regions, is covered with an insulating layer 42 composed of
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com