About: http://webisa.webdatacommons.org/138780895

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 6F, a protective layer 130 is formed by depositing an insulating material such as silicon oxide or silicon nitride on the whole surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au