About: http://webisa.webdatacommons.org/138849229

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A slow etch process (e.g., <100 ???/min) may be conducted to remove contaminants and surface irregularities, such as roughness, from a substrate surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au