About: http://webisa.webdatacommons.org/13899242

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The TFR structure can be formed on the substrate, such as a silicon (Si), gallium arsenide (GaAs) or other semiconductor substrate, for monolithic integration purposes, such as integration with active semiconductor devices.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com