About: http://webisa.webdatacommons.org/139741633

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	By this anneal (deairing), removed are an impurity such as oxygen and moisture attached to the substrate, and an impurity such as oxygen and moisture in a film formed on the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com