About: http://webisa.webdatacommons.org/139807093

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Other thicknesses or materials such as silicon nitride or a polyimide may also be used, alone or in combination.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com