About: http://webisa.webdatacommons.org/139897794

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Still further, item 10 of the present invention is a method of producing a semiconductor substrate with a low defect density silicon layer formed on an insulating underlay, the method comprising:
http://www.w3.org/ns/prov#wasQuotedFrom	google.com