About: http://webisa.webdatacommons.org/140352863

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another portion of the fluorine reacts with other species including carbon contained in the process gas to form a polymer on the surface of the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com