About: http://webisa.webdatacommons.org/140357805

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In various embodiments, a tantalum silicon oxynitride film may be doped with elements or compounds other than silicon, tantalum, oxygen, and nitrogen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com