| http://www.w3.org/ns/prov#value | - In the actuator 510 according to the eleventh embodiment, as shown in FIG. 46, the guides 512a, 512b and the frame 514 are integrally formed of one material such as aluminum, and the first side plates 534a, 534b and the second side plates 536a, 536b are anodized and then coated with a polytetrafluoroethylene layer.
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