About: http://webisa.webdatacommons.org/140403930

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the foregoing polishing system, the process condition is an indication to indicate a step being implemented among the plurality of polishing steps.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com