About: http://webisa.webdatacommons.org/140439787

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the step shown in FIG. 29, an n-type impurity such as phosphorus, arsenic, or antimony or a p-type impurity such as boron is introduced into the active region 1103??? to form relatively lightly doped source and drain regions 1058.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com