| http://www.w3.org/ns/prov#value | - In an embodiment of the present invention, the light emanating from a laser beam, e.g. a He???Ne laser, is directed through a window of an etching chamber on to the photoresist mask overlaying a substrate, shown as line 20 in FIG. 1, while the photoresist mask is undergoing lateral processing in the plasma chamber.
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