About: http://webisa.webdatacommons.org/140619474

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, there is a need for a method of cleaning a silicon surface in which the cleaned surface has enhanced stability against oxidation in a clean room environment, without the need for special transport and storage hardware.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au