About: http://webisa.webdatacommons.org/140632791

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to a further object of the present invention, the dielectric layer is made of a material that is mainly polyimide or benzocyclobutene. 14.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com