About: http://webisa.webdatacommons.org/140649919

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, there is a need to substantially reduce the number of incidents in which a wafer or substrate becomes stuck to a clamp in such systems.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com