About: http://webisa.webdatacommons.org/140695500

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, such techniques allow for the formation of a variety of micromechanical structures using adaptations of patterning, deposition, etching, and other processes that were originally developed for semiconductor fabrication.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com