About: http://webisa.webdatacommons.org/140821006

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 26 is a cross-sectional drawing for explaining the feature in which grooves are formed from the back surface of the wafer 10 in the third embodiment of the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com