About: http://webisa.webdatacommons.org/141043458

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 9A is a top plan view of an example embodiment of a 3???3 array of MEMS devices of FIG. 8A.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca