About: http://webisa.webdatacommons.org/141085181

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 6 is a schematic representation of an exemplary optical system useful in imaging a field stop onto a wafer in accordance with a preferred embodiment of the present invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com