About: http://webisa.webdatacommons.org/141103383

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	First, a photoresist layer is formed on a substrate such as a silicon wafer in the usual manner.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com