| http://www.w3.org/ns/prov#value | - Planarization can be performed in any number of ways, such as reflowing the material, or abrading to a flat surface by polishing, or by chemical mechanical polishing, all of which, still make the resulting surface not flat to the required levels, or that contaminants, and other defects are imparted to the surface from the planarizing equipment and processes.
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