About: http://webisa.webdatacommons.org/14134135

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1 further comprising forming a layer including titanium, zirconium, or hafnium on the metallic layer prior to annealing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com