About: http://webisa.webdatacommons.org/141493590

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A barrier layer, for example composed of titanium nitride, is also inserted between the insulating layer 4 and the metal layer 5, which will be described in the following text.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com