About: http://webisa.webdatacommons.org/141827546

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A wafer handling apparatus as claimed in claim 1, wherein said heater is an electric heater which produces heat when electric current is supplied thereto, and said controller is configured to supply current intermittently to said heater.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com