About: http://webisa.webdatacommons.org/14192010

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention particularly pays attention to a variation of the imaging characteristics caused by thermal deformation of the reticle
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com