About: http://webisa.webdatacommons.org/141971362

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also provided according to the present invention, is an exposure apparatus in which a surface of a reticle is uniformly illuminated.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es