About: http://webisa.webdatacommons.org/142035981

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Although the illustrated embodiment depicts FOUPs for housing wafers, it is appreciated that other devices including cassettes and racks may be used to support the wafers awaiting processing or following processing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr