About: http://webisa.webdatacommons.org/142087870

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, a material film containing mainly Ti, which has a low contact resistance, may be used as the third conductive layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com