| http://www.w3.org/ns/prov#value | - Further, from the viewpoints of keeping the solubility in the polishing liquid, the low-foamability, and the polishing speed at practical levels, and suppressing the dishing, these compounds have preferably from 7 to 20 carbon atoms, more preferably from 7 to 16 carbon atoms, still more preferably from 7 to 12 carbon atoms, especially preferably from 7 to 10 carbon atoms.
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