| http://www.w3.org/ns/prov#value | - Due to variables such as heat losses at the peripheral edges of substrate 19 and susceptor 20, the flow of reactant gas through reaction chamber 10 and the like, lamps 48A, 48D, 78A and 78D may be ideally set to normally operated at temperatures which are offset, i.e., different than the desired operating temperature in the central area of the substrate and the susceptor.
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