About: http://webisa.webdatacommons.org/142156478

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Subsequently, the trenches 3, 4, 6 are filled with dielectric material; to this end, an insulating layer not shown herein, for example silicon oxide, is deposited on top of the first wafer 1 and then removed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com