About: http://webisa.webdatacommons.org/142194175

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such films need to have an overall low compressive stress, because intrinsic stress levels above or below certain levels may lead to wafer bowing, film cracking, void formation in the film, or other problems.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com